JPH01144852U - - Google Patents

Info

Publication number
JPH01144852U
JPH01144852U JP3020689U JP3020689U JPH01144852U JP H01144852 U JPH01144852 U JP H01144852U JP 3020689 U JP3020689 U JP 3020689U JP 3020689 U JP3020689 U JP 3020689U JP H01144852 U JPH01144852 U JP H01144852U
Authority
JP
Japan
Prior art keywords
wavelength
ray
sample surface
scanning
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3020689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0345176Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3020689U priority Critical patent/JPH0345176Y2/ja
Publication of JPH01144852U publication Critical patent/JPH01144852U/ja
Application granted granted Critical
Publication of JPH0345176Y2 publication Critical patent/JPH0345176Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP3020689U 1989-03-16 1989-03-16 Expired JPH0345176Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3020689U JPH0345176Y2 (en]) 1989-03-16 1989-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3020689U JPH0345176Y2 (en]) 1989-03-16 1989-03-16

Publications (2)

Publication Number Publication Date
JPH01144852U true JPH01144852U (en]) 1989-10-04
JPH0345176Y2 JPH0345176Y2 (en]) 1991-09-24

Family

ID=31255068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3020689U Expired JPH0345176Y2 (en]) 1989-03-16 1989-03-16

Country Status (1)

Country Link
JP (1) JPH0345176Y2 (en])

Also Published As

Publication number Publication date
JPH0345176Y2 (en]) 1991-09-24

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